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标 题: A circular hydrostatic shallow recess thrust bearing integrating a micro-range tilting axis
集成微小倾角轴的圆环静压浅沟推力轴承
作 者: Fabian A. Tripkewitz
Matthias Fritz
Matthias Weigold
关键词: Hydrostatic bearing  [静压轴承]
Micro actuator  [ 微型执行器]
Orientation error  [ 方向误差]
Compensation  [ 补偿]
出版年: 2024
期刊名: Tribology International
摩擦学国际
年卷期: 2024, vol.193
摘 要: This article investigates the integration of a micro-range (± 10 μrad) tilting axis into a shallow recess hydrostatic thrust bearing. The working principle relies on pressure taps machined into the bearing geometry, enabling the external manipulation of the local pressure distribution, causing a change in film geometry to restore equilibrium. To estimate the possibilities and limitations, the article presents a theoretical approach to calculate the properties of the integrated tilting axis and the influence on the inherent tilting stiffness of the bearing. Furthermore, performed measurements at 10 μm film height and 10 MPa supply pressure validate the proposed theory. This technology enables the extension of a conventional hydrostatic bearing by a robust, highly sensitive, and low-cost micro-range tilting axis.

本文研究将微小量程(±10 μrad)的倾斜轴集成到浅凹式静压推力轴承中的可行性。其工作原理基于在轴承结构中加工出的压力取样点,通过外部调控局部压力分布,从而改变薄膜几何形状以恢复平衡状态。为评估该技术的潜力与局限性,文章提出了一种理论方法,用于计算集成倾斜轴的特性及其对轴承固有倾斜刚度的影响。此外,在薄膜厚度为10 μm、供压10 MPa条件下进行的实验测量验证了所提出的理论。该技术可使传统静压轴承扩展为一种坚固、高灵敏度且低成本的微小量程倾斜轴。
中文内容为网络AI翻译,专业术语未必准确,仅供参考。

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