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国外文献 > 1.轴承 > 2. 轴承类型与部件 > 磁悬浮轴承

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标 题： A High-Precision Dual-Servo Stage Using Halbach Linear Active Magnetic Bearings
采用哈尔巴赫线性主动磁悬浮轴承的高精度双伺服台面
作 者： Young-Man Choi
Dae-Gab Gweon
关键词： Electromagnets  [电磁铁]
Magnetic levitation  [ 磁悬浮]
Motion control  [ 运动控制]
出版年： 2011
期刊名： IEEE/ASME Transactions on Mechatronics
IEEE/ASME 机电一体化杂志
年卷期： 2011, vol.16, no.5
摘 要： In this paper, a high-precision dual-servo stage with a magnetically levitated fine stage is described. For magnetic levitation, a Halbach linear active magnetic bearing (HLAMB) is used. The HLAMB has two functions: gravity compensation and actively control of vertical motion. To implement these functions, the HLAMB utilizes permanent magnet arrays and Lorentz coils. The fine stage has positioning capabilities with 6 DOF due to four HLAMBs and four voice coil motors (VCM). The HLAMBs control out-of-plane motions, and the VCM control in-plane motions. The fine stage achieves high-precision position feedback using laser interferometers and capacitive sensors. The coarse stage has an H-type structure that can carry the fine stage 300 mm by 300 mm along the x- and y-axes. Positioning and scanning performances are verified by the experimental results. It has ±10 and ±15 nm in-position stability in the x- and y-axes, respectively. At the scan with 10 mm/s constant velocity, ±1 nm mean tracking error and 4.7 nm jitter were obtained.

本文描述了一种高精度双伺服平台，其采用磁悬浮微位移台。为实现磁悬浮，使用了Halbach线性主动磁轴承（HLAMB）。HLAMB具有两个功能：重力补偿和垂直运动的主动控制。为实现这些功能，HLAMB利用永磁体阵列和洛伦兹线圈。由于配备了四个HLAMB和四个音圈电机（VCM），微位移台具备6自由度的定位能力。HLAMB控制非平面方向的运动，而VCM则控制平面方向的运动。微位移台通过激光干涉仪和电容式传感器实现高精度的位置反馈。粗位移台采用H型结构，可在x轴和y轴方向上将微位移台沿300 mm×300 mm范围移动。实验结果验证了其定位与扫描性能，x轴和y轴方向的定位稳定性分别为±10 nm和±15 nm。在以10 mm/s恒定速度扫描时，平均跟踪误差为±1 nm，抖动量为4.7 nm。
中文内容为网络AI翻译，专业术语未必准确，仅供参考。

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