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国外文献 > 1.轴承 > 4. 设计与分析 > 算法与优化

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标 题： A Vacuum-Compatible Air Bearing: Design Analysis and Optimization
真空兼容式空气轴承：设计分析与优化
作 者： G. H. Khim
C. H. Park
H. S. Lee
S. W. Kim
关键词： Vacuum-compatible air bearing  [真空兼容气动轴承]
Leakage analysis  [ 泄漏分析]
Degree of vacuum  [ 真空度]
Optimal design  [ 最佳设计]
Genetic algorithm  [ 遗传算法]
出版年： 2007
文集名： Progress of Precision Engineering and Nano Technology
精密工程与纳米技术的发展
会议名： 1st International Conference on Precision Engineering and Micro/Nano Technology in Asia (ASPEN)
首届亚洲精密工程与微/纳米技术国际会议（ASPEN）
届 次： 1st
摘 要： This paper describes the vacuum-compatible air bearing designed with a cascaded exhaust scheme to minimize the leakage of air in a vacuum environment. The design of the air bearing, including the differential exhaust system, required great care because several design parameters, such as the number of exhaust stages, diameter and length of the exhaust tube, pumping speed and ultimate pressure of the vacuum pump, and seal length and gap greatly influenced the leakage of air and thus the degree of vacuum. A leakage analysis was performed to estimate the chamber pressure and an optimization method based on the genetic algorithm was proposed under several constraint conditions. The results showed that the degree of vacuum improved dramatically compared to the initial design, and that the distribution of the spatial design parameters and technical limit of the pumping speed were well achieved.

本文介绍了一种采用级联排气方案的真空兼容式气垫设计，旨在最大限度地减少在真空环境中的空气泄漏。气垫的设计，包括差压排气系统，需要格外谨慎，因为多个设计参数，如排气级数、排气管的直径和长度、真空泵的抽速及最终压力，以及密封件的长度和间隙，均对空气泄漏量及因此产生的真空度产生重大影响。通过进行泄漏分析估算腔室压力，并在多种约束条件下提出了一种基于遗传算法的优化方法。结果表明，与初始设计相比，真空度显著提高，且空间设计参数分布与抽速技术极限均得到了良好实现。
中文内容为网络AI翻译，专业术语未必准确，仅供参考。

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